Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
نویسندگان
چکیده
منابع مشابه
Mems Measurement by Digital Holographic Microscope
A universal digital holographic microscope to measure shape and displacement of microelement and MEMS (MicroElectroMechnacalSystems) is presented. This device is designed to exploit a measurement for MEMS with either a smooth or a rough surface. The method is based on digital laser interferometry and digital laser speckle interferometry (TV holography) incorporated with optoelectronic devices i...
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Microscope has been widely used to observe microscopic objects. The types of microscope are varied according to its function. The conventional optical microscope only provides intensity information of an object and it has some difficulties to provide information about the real shape of the object and the projection of the object in different depth and perspective. In addition, optical microscop...
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ژورنال
عنوان ژورنال: Journal of Visualized Experiments
سال: 2016
ISSN: 1940-087X
DOI: 10.3791/53630